Microsensors Principles And Applications

Microsensors

Microsensors

Essential update on the development of new processing, packaging and assembly methodologies for microsensor devices, with new coverage on ‘system on a chip’ and ‘laboratory on a chip’ The miniaturisation of sensors has been made possible by advances in the technologies originating in the semiconductor industry, and the emergent field of microsensors has grown rapidly over the past ten years. This book updates the successful first edition (published in 1994) to cover the fundamental principles, developments and applications of microsensors. Two new chapters will be included and will provide coverage of both CMOS device processing technologies and smart sensors, in particular BioMEMS and the system-on-chip, lab-on-a-chip, and noise-on-a-chip. Other new sections will update the treatment of optical and magnetic sensors, MOEMS and smart sensor interfacing. Worked examples will be included to illustrate key processes and applications. The end-of-chapter problems will be revised and updated. This is an increasingly important area of research and development. Microsensors are a growing aspect of Microelectronics courses at final year undergraduate and postgraduate level. A thorough update of the well-received first edition is timely. Provides a timely update of a classic reference on this increasingly important field Presents an introduction to sensors and measurement systems and the processing of materials for microsensor fabrication Comprehensive coverage of thermal, magnetic, optical, mechanical, chemical and biological microsensors Updated sections highlighting the development of new processing, packaging and assembly methodologies for microsensor devices New chapter charting the evolution of the smart sensor and microsystem, with coverage of ‘system on a chip’ and ‘laboratory on a chip’

Microsystem Technology and Microrobotics

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.