What Is A Mems Device
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MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications
The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications. MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs). This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.
Microelectromechanical Systems and Devices
Author: Nazmul Islam
language: en
Publisher: BoD – Books on Demand
Release Date: 2012-03-28
The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.
Microelectromechanical Systems (MEMS) - Innovation, Manufacturing Techniques and Applications
Author: Zdravko Stanimirović
language: en
Publisher: BoD – Books on Demand
Release Date: 2025-02-26
To present their latest work in the field of Microelectromechanical systems (MEMS), researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their chapters will give you the opportunity to learn about advanced materials, techniques, and applications in MEMS. The topics presented included flexible MEMS techniques for multi-physical sensors, highlighting the adaptability of these systems to complex sensing environments and the use of MEMS in optical and photonic devices, demonstrating their impact on advanced imaging and communication technologies. The book also explores biomedical MEMS, which are advancing healthcare through improved diagnostics and therapeutic tools. The editors hope the book will allow professionals and readers not involved in the immediate field to understand and enjoy the topic.