Smart Material Systems And Mems
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Smart Material Systems and MEMS
Author: Vijay K. Varadan
language: en
Publisher: John Wiley & Sons
Release Date: 2006-11-02
Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.
Smart Sensors and MEMS
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions.Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems.Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. - Outlines industrial applications for smart sensors and smart MEMS - Covers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperature - Covers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers
Smart Material Systems
Smart Material Systems explores the innovative realm of stimuli-responsive materials, offering a comprehensive look at their science, applications, and design. Imagine materials capable of adapting to their environment, such as shape memory alloys returning to their original form after deformation or piezoelectric materials generating electricity under pressure. This book uniquely bridges the gap between material science and engineering, explaining how these materials are integrated into sensors, actuators, and adaptive structures. The book emphasizes an integrated design methodology, crucial for developing smart material systems that function reliably. It begins with the fundamentals of stimuli-responsive materials, then delves into specific types like electro-rheological fluids and magneto-rheological fluids. Progressing through the book, you'll discover sensor and actuator design, control strategies, and real-world applications in diverse fields like aerospace and biomedical engineering. The book highlights that a holistic understanding of material behavior, application, and system integration is key to unlocking the full potential of smart materials.