Semiconductor Lithography
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Semiconductor Lithography
Author: Wayne M. Moreau
language: en
Publisher: Springer Science & Business Media
Release Date: 2012-12-06
Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography. Lithography, as adopted by the semiconductor industry, is the process of drawing or printing the pattern of an integrated circuit in a resist material. The pattern is formed and overlayed to a previous circuit layer as many as 30 times in the manufacture of logic and memory devices. With the resist pattern acting as a mask, a permanent device structure is formed by subtractive (removal) etching or by additive deposition of metals or insulators. Each process step in lithography uses inorganic or organic materials to physically transform semiconductors of silicon, insulators of oxides, nitrides, and organic polymers, and metals, into useful electronic devices. All forms of electromagnetic radiation are used in the processing. Lithography is a mUltidisciplinary science of materials, processes, and equipment, interacting to produce three-dimensional structures. Many aspects of chemistry, electrical engineering, materials science, and physics are involved. The purpose of this book is to bring together the work of many scientists and engineers over the last 10 years and focus upon the basic resist materials, the lithographic processes, and the fundamental principles behind each lithographic process.
Fundamental Principles of Optical Lithography
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Lithography Essentials
"Lithography Essentials" is a comprehensive guide to mastering the materials and tools essential for creating stunning lithographic prints. Written by an expert in the field, this book provides an in-depth examination of the entire lithography process, from the selection of materials to the troubleshooting of common problems. Inside, you'll discover everything you need to know about lithographic stones, photoresist materials, lithographic inks, chemical developers, etching solutions, mask materials, substrate materials, printing plates, ink types, cleaning agents, protective coatings, and more. You'll also learn how to select the right tools and equipment for your needs, and how to troubleshoot any problems that may arise. With over 100 illustrations and step-by-step instructions, "Lithography Essentials" is the ultimate resource for anyone looking to master the art of lithography. Whether you're a beginner or an experienced printmaker, this book will help you achieve stunning results.