Secondary Electron Energy Spectroscopy In The Scanning Electron Microscope
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Secondary Electron Energy Spectroscopy In The Scanning Electron Microscope
This book deals with the subject of secondary energy spectroscopy in the scanning electron microscope (SEM). The SEM is a widely used research instrument for scientific and engineering research and its low energy scattered electrons, known as secondary electrons, are used mainly for the purpose of nanoscale topographic imaging. This book demonstrates the advantages of carrying out precision electron energy spectroscopy of its secondary electrons, in addition to them being used for imaging. The book will demonstrate how secondary electron energy spectroscopy can transform the SEM into a powerful analytical tool that can map valuable material science information to the nanoscale, superimposing it onto the instrument's normal topographic mode imaging. The book demonstrates how the SEM can then be used to quantify/identify materials, acquire bulk density of states information, capture dopant density distributions in semiconductor specimens, and map surface charge distributions.
Scanning Electron Microscope Optics and Spectrometers
This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself.The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.
Electron Energy-Loss Spectroscopy in the Electron Microscope
Author: R.F. Egerton
language: en
Publisher: Springer Science & Business Media
Release Date: 2013-03-09
to the Second Edition Since the first (1986) edition of this book, the numbers of installations, researchers, and research publications devoted to electron energy-loss spec troscopy (EELS) in the electron microscope have continued to expand. There has been a trend towards intermediate accelerating voltages and field-emission sources, both favorable to energy-loss spectroscopy, and sev eral types of energy-filtering microscope are now available commercially. Data-acquisition hardware and software, based on personal computers, have become more convenient and user-friendly. Among university re searchers, much thought has been given to the interpretation and utilization of near-edge fine structure. Most importantly, there have been many practi cal applications of EELS. This may reflect an increased awareness of the potentialities of the technique, but in many cases it is the result of skill and persistence on the part of the experimenters, often graduate students. To take account of these developments, the book has been extensively revised (over a period of two years) and more than a third of it rewritten. I have made various minor changes to the figures and added about 80 new ones. Except for a few small changes, the notation is the same as in the first edition, with all equations in SI units.