Resolution Enhancement Techniques In Deep Uv Optical Lithography For The 90nm Silicon Technological Node And Below
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Microelectronics Technology and Devices, SBMICRO 2002
Author: Electrochemical Society. Electronics Division
language: en
Publisher: The Electrochemical Society
Release Date: 2002
Nanometer CMOS
Author: Frank Schwierz
language: en
Publisher: Pan Stanford Publishing
Release Date: 2010-02-28
This book presents the material necessary for understanding the physics, operation, design, and performance of modern MOSFETs with nanometer dimensions. Other topics covered include high-k dielectrics and mobility enhancement techniques, MOSFETs for RF (radio frequency) applications, MOSFET fabrication technology.