Rapid Thermal And Other Short Time Processing Technologies Iii
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Rapid Thermal and Other Short-time Processing Technologies III
Author: Paul J. Timans
language: en
Publisher: The Electrochemical Society
Release Date: 2002
Rapid Thermal and Other Short-time Processing Technologies II
Author: Dim-Lee Kwong
language: en
Publisher: The Electrochemical Society
Release Date: 2001
"Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."
Rapid Thermal and Other Short-time Processing Technologies
Author: Fred Roozeboom
language: en
Publisher: The Electrochemical Society
Release Date: 2000
The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.