Plasma Etching Processes For Sub Quarter Micron Devices
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Plasma Etching Processes for Sub-quarter Micron Devices
Author: G. S. Mathad
language: en
Publisher: The Electrochemical Society
Release Date: 2000
Proceedings of the Eleventh International Symposium on Plasma Processing
Author: Electrochemical Society. Dielectric Science and Technology Division
language: en
Publisher: The Electrochemical Society
Release Date: 1996