Physics And Modeling Of Boron Diffusion Activation And Evolution Of Extended Defects And Point Defects During Rapid Thermal Annealing Of Ion Implanted Silicon


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American Doctoral Dissertations


American Doctoral Dissertations

Author:

language: en

Publisher:

Release Date: 1993


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Proceedings of Technical Papers


Proceedings of Technical Papers

Author:

language: en

Publisher:

Release Date: 1995


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