Performance Of Cantilever Based Piezoelectric Mems Resonators In Liquid Environment
Download Performance Of Cantilever Based Piezoelectric Mems Resonators In Liquid Environment PDF/ePub or read online books in Mobi eBooks. Click Download or Read Online button to get Performance Of Cantilever Based Piezoelectric Mems Resonators In Liquid Environment book now. This website allows unlimited access to, at the time of writing, more than 1.5 million titles, including hundreds of thousands of titles in various foreign languages.
Piezoelectric MEMS
This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines
Resonant MEMS
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.