Multi Wavelength Pyrometric Systems For Emissivity Independent Non Contact Temperature Sensing
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Multi-wavelength Pyrometric Systems for Emissivity-independent Non-contact Temperature Sensing
A Multi-Wavelength Imaging Pyrometer (M-WIP) for real-time remote sensing of temperature profiles of targets with unknown emissivity was developed and demonstrated. To measure the spectral radiance of a target at several distinct wavelengths an M-WIP system was implemented based on an 320x122-element PtSi IR-CCD imager with an assembly of 7 narrow-band 1k filters in the range from 1790nm to 4536nm. A real-time algorithm for simultaneous estimation of the temperature and model parameters of the target emissivity from the least-squares fit of the theoretical model of 1k camera output signal to the experimental spectral measurements was developed and implemented. This rea1-time least-squares minimization was accomplished by combination of Levenberg-Marquardt and simulated annealing algorithms. The least-squares-based calibration algorithm was developed for evaluation of effective values of peak transmissions and center wavelengths of M-WIP channels based on the detection of radiation from pre-calibrated blackbody source. To achieve high radiometric accuracy, compensation for the dark current charge as function of the detected signal level was implemented. The effect of the response non-linearity of IR imager was minimized by developing an algorithm for imager operation at fixed pre-selected signal level for each M-WIP spectral channel based on adaptive control of the duration of the optical integration time of the imager. Initial testing demonstrated an accuracy of ±l.0°C for real-time temperature measurements of the center of the blackbody aperture in the range from 500°C to 1000°C. Temperature resolution of ±3°C was demonstrated for the blackbody source viewed through a double side polished silicon wafer with unknown spectral transmissivity in the temperature range from 500°C to 900°C.
Transient Thermal Processing Techniques in Electronic Materials
Author: Nuggehalli M. Ravindra
language: en
Publisher: Minerals, Metals, & Materials Society
Release Date: 1996
This volume presents a research update of silicon and non-silicon transient processing techniques such as rapid thermal processing, pulsed laser processes, flash evaporation, jet processes, and more. Also covered are process sensors, equipment issues, and the manufacturing perspective.
Radiometric Temperature Measurements
This book describes the theory of radiation thermometry, both at a primary level and for a variety of applications, such as in the materials processing industries and remote sensing. This book is written for those who will apply radiation thermometry in industrial practice; use radiation thermometers for scientific research; the radiation thermometry specialist in a national measurement institute; developers of radiation thermometers who are working to innovate products for instrument manufacturers, and developers of non-contact thermometry methods to address challenging thermometry problems. The authors of each chapter were chosen from a group of international scientists who are experts in the field and specialists on the subject matter covered in the chapter. A large number of references are included at the end of each chapter as a resource for those seeking a deeper or more detailed understanding. This book is more than a practice guide, readers will gain in-depth knowledge in: (1) the proper selection of the type of thermometer; (2) the best practice in using the radiation thermometers; (3) awareness of the error sources and subsequent appropriate procedure to reduce the overall uncertainty; and (4) understanding of the calibration chain and its current limitations. - Covers all fundamental aspects of the radiometric measurements - Discusses practical applications with details on the instrumentation, calibration, and error sources - Authors are from leading national labs working in R&D of temperature measurements