Molecular Dynamics Simulations Of Plasma Surface Interactions For Microelectronics Processing Applications


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Atomistic Simulations of Plasma-surface Interactions


Atomistic Simulations of Plasma-surface Interactions

Author: Maria Eve Barone

language: en

Publisher:

Release Date: 1995


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Dissertation Abstracts International


Dissertation Abstracts International

Author:

language: en

Publisher:

Release Date: 2006


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