Modelling Of Mems Vibratory Gyroscopes Utilizing Phase Detection

Modelling of MEMS Vibratory Gyroscopes Utilizing Phase Detection

Proceedings of ISSS International Conference on Micro, Nano, and Smart Systems

This book presents select proceedings of the ISSS International Conference on Micro, Nano, and Smart Systems (IC-MNSS) in IISc Bengaluru during July 9 to 12, 2024 and presents different applications of smart materials and systems in aerospace, robotics, quantum, agriculture, and biomedical technologies followed by microfabrication processes and packaging technologies required to design and develop different sensors on micro and nanoscale. The first few chapters cover shape memory alloys (SMA) and its modelling and remaining chapters outline the application of smart systems and materials in quantum technology, digital agriculture, and healthcare. After describing the microfabrication processes in bulk and surface micromachining processes, the design and development of various sensors are demonstrated in the last few chapters. The book is valuable to researchers and professionals working in the area of micro and nano-based design, fabrication, and development of sensors, and their application in smart systems, water purification, and energy harvesting.

MEMS Vibratory Gyroscopes

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.