Microelectronics Journal
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Chemistry in Microelectronics
Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in “Front End Of the Line” which corresponds to the heart and performance of individual transistors, then moving on to the “Back End Of the Line” which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the “Front End of the Line” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008.
Nanoelectronics
Brings the Band Structure of Carbon-Based Devices into the Limelight A shift to carbon is positioning biology as a process of synthesis in mainstream engineering. Silicon is quickly being replaced with carbon-based electronics, devices are being reduced down to nanometer scale, and further potential applications are being considered. While traditionally, engineers are trained by way of physics, chemistry, and mathematics, Nanoelectronics: Quantum Engineering of Low-Dimensional Nanoensembles establishes biology as an essential basic science for engineers to explore. Unifies Science and Engineering: from Quantum Physics to Nanoengineering Drawing heavily on published papers by the author, this research-driven text offers a complete review of nanoelectronic transport starting from quantum waves, to ohmic and ballistic conduction, and saturation-limited extreme nonequilibrium conditions. In addition, it highlights a new paradigm using non-equilibrium Arora’s Distribution Function (NEADF) and establishes this function as the starting point (from band theory to equilibrium to extreme nonequilibrium carrier statistics). The author focuses on nano-electronic device design and development, including carbon-based devices, and provides you with a vantage point for the global outlook on the future of nanoelectronics devices and ULSI. Encompassing ten chapters, this illuminating text: Converts the electric-field response of drift velocity into current–voltage relationships that are driven by the presence of critical voltage and saturation current arising from the unidirectional drift of carriers Applies the effect of these scaled-down dimensions to nano-MOSFET (metal–oxide–semiconductor field-effect transistor) Considers specialized applications that can be tried through a number of suggested projects that are all feasible with MATLAB® codes Nanoelectronics: Quantum Engineering of Low-Dimensional Nanoensembles contains the latest research in nanoelectronics, identifies problems and other factors to consider when it comes to nanolayer design and application, and ponders future trends. Print Versions of this book also include access to the ebook version.
New Technologies
Author: Constantin Volosencu
language: en
Publisher: BoD – Books on Demand
Release Date: 2012-03-30
The book "New Technologies - Trends, Innovations and Research" presents contributions made by researchers from the entire world and from some modern fields of technology, serving as a valuable tool for scientists, researchers, graduate students and professionals. Some practical applications in particular areas are presented, offering the capability to solve problems resulted from economic needs and to perform specific functions. The book will make possible for scientists and engineers to get familiar with the ideas from researchers from some modern fields of activity. It will provide interesting examples of practical applications of knowledge, assist in the designing process, as well as bring changes to their research areas. A collection of techniques, that combine scientific resources, is provided to make necessary products with the desired quality criteria. Strong mathematical and scientific concepts were used in the applications. They meet the requirements of utility, usability and safety. Technological applications presented in the book have appropriate functions and they may be exploited with competitive advantages. The book has 17 chapters, covering the following subjects: manufacturing technologies, nanotechnologies, robotics, telecommunications, physics, dental medical technologies, smart homes, speech technologies, agriculture technologies and management.