Microelectromechanical Structures For Materials Research
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Microelectromechanical Structures for Materials Research
Reports recent developments in a field that is coalescing but still lacks the coherence or certainty of a mature discipline in terms of accepted methodologies. The 39 papers discuss the resonance method as an attractive way to evaluate mechanical properties of thin gold films, heating effects on the Young's modulus of films sputtered onto micromachined resonators, test methods for characterizing piezoelectric thin films, polysilicon tensile testing with electrostatic gripping, silicon-based epitaxial films, and other aspects. Annotation copyrighted by Book News, Inc., Portland, OR
The MEMS Handbook
The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.
MEMS
Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. The first volume, MEMS: Introduction and Fundamentals builds the required background and explores various physical considerations of MEMS. Topics include scaling, simulation models, the basics of control theory, and the physics of materials flow, thin liquid films, and bubble/drop transport. New chapters in this edition address lattice Boltzmann simulations and microscale hydrodynamics. Standing well on its own, this books builds an outstanding foundation for further exploration of MEMS and their applications.