Metrology Based Control For Micro Manufacturing
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Metrology-based Control for Micro-manufacturing
Author: Kenneth W. Tobin
language: en
Publisher: SPIE-International Society for Optical Engineering
Release Date: 2001
Proceedings of the 10th International Conference on Metrology and Properties of Engineering Surfaces
Author: Tom R. Thomas
language: en
Publisher: Université de Saint-Etienne
Release Date: 2005
Surface Metrology for Micro- and Nanofabrication
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. - Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology - Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components - Assesses the best techniques for repairing micro-defects