Mems Moems Components And Their Applications
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Optical MEMS, Nanophotonics, and Their Applications
This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
MEMS and MOEMS Technology and Applications
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.