Mems Field Models And Optimal Design

MEMS: Field Models and Optimal Design

This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.

Computational Methods for the Innovative Design of Electrical Devices

Computational Methods for the Innovative Design of Electrical Devices is entirely focused on the optimal design of various classes of electrical devices. Emerging new methods, like e.g. those based on genetic algorithms, are presented and applied in the design optimization of different devices and systems. Accordingly, the solution to field analysis problems is based on the use of finite element method, and analytical methods as well. An original aspect of the book is the broad spectrum of applications in the area of electrical engineering, especially electrical machines. This way, traditional design criteria of conventional devices are revisited in a critical way, and some innovative solutions are suggested. In particular, the optimization procedures developed are oriented to three main aspects: shape design, material properties identification, machine optimal behaviour. Topics covered include: • New parallel finite-element solvers • Response surface method • Evolutionary computing • Multiobjective optimization • Swarm intelligence • MEMS applications • Identification of magnetic properties of anisotropic laminations • Neural networks for non-destructive testing • Brushless DC motors, transformers • Permanent magnet disc motors, magnetic separators • Magnetic levitation systems

Optimal Design and Fabrication of Micro-electro-mechanical Structures - with Applications to Comb Drives