Materials Science Of Microelectromechanical Systems Mems Devices

Silicon Carbide Micro Electromechanical Systems for Harsh Environments

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Sample Chapter(s). Chapter 1: Introduction to Silicon Carbide (SIC) Microelectromechanical Systems (MEMS) (800 KB). Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996OCo2002 (L M Porter & F A Mohammad); Dry Etching of SiC (S J Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research."

Microelectromechanical Systems (MEMS) - Innovation, Manufacturing Techniques and Applications

To present their latest work in the field of Microelectromechanical systems (MEMS), researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their chapters will give you the opportunity to learn about advanced materials, techniques, and applications in MEMS. The topics presented included flexible MEMS techniques for multi-physical sensors, highlighting the adaptability of these systems to complex sensing environments and the use of MEMS in optical and photonic devices, demonstrating their impact on advanced imaging and communication technologies. The book also explores biomedical MEMS, which are advancing healthcare through improved diagnostics and therapeutic tools. The editors hope the book will allow professionals and readers not involved in the immediate field to understand and enjoy the topic.

Materials Science of Microelectromechanical Systems (MEMS) Devices IV