Materials Fundamentals Of Gate Dielectrics

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Materials Fundamentals of Gate Dielectrics

Author: Alexander A. Demkov
language: en
Publisher: Springer Science & Business Media
Release Date: 2006-05-24
This book presents materials fundamentals of novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scalling of the CMOS devices. This is a very fast evolving field of research so we choose to focus on the basic understanding of the structure, thermodunamics, and electronic properties of these materials that determine their performance in device applications. Most of these materials are transition metal oxides. Ironically, the d-orbitals responsible for the high dielectric constant cause sever integration difficulties thus intrinsically limiting high-k dielectrics. Though new in the electronics industry many of these materials are wel known in the field of ceramics, and we describe this unique connection. The complexity of the structure-property relations in TM oxides makes the use of the state of the art first-principles calculations necessary. Several chapters give a detailed description of the modern theory of polarization, and heterojunction band discontinuity within the framework of the density functional theory. Experimental methods include oxide melt solution calorimetry and differential scanning calorimetry, Raman scattering and other optical characterization techniques, transmission electron microscopy, and x-ray photoelectron spectroscopy. Many of the problems encounterd in the world of CMOS are also relvant for other semiconductors such as GaAs. A comprehensive review of recent developments in this field is thus also given. The book should be of interest to those actively engaged in the gate dielectric research, and to graduate students in Materials Science, Materials Physics, Materials Chemistry, and Electrical Engineering.
Metal Oxide-based High-K Dielectrics

This book provides chronological advancement of metal oxide high-K dielectrics up to contemporary scenarios, synthesis with suitability and challenges, and diverse properties with emerging technological applications. It helps readers select metal oxide-based high-K dielectrics with large band-gap, cost-effective, and highly efficient material properties for plausible applications. It provides up-to-date research findings on established synthesis techniques, easy processing, characterization, properties, and prospective practical applicability, including hybrid materials. Features: Exhaustively covers synthesis, physical properties, and the applications of the high-K dielectrics Focuses on synthetic routes of preparation, properties, and their various practical applications from bench to field Discusses functionalization of novel metal oxides and flexible polymeric composite materials for superior dielectric and electrical performance Explores facile synthesis techniques for high-K dielectrics and their hybrid composites, properties, and technological applications Includes future perspectives and possible challenges for applying high–K dielectric materials This book is aimed at researchers and graduate students in materials science and engineering, physics, and electrical engineering.
Dielectric Polymer Nanocomposites

Author: J. Keith Nelson
language: en
Publisher: Springer Science & Business Media
Release Date: 2009-12-17
Dielectric Polymer Nanocomposites provides the first in-depth discussion of nano-dielectrics, an emerging and fast moving topic in electrical insulation. The text begins with an overview of the background, principles and promise of nanodielectrics, followed by a discussion of the processing of nanocomposites and then proceeds with special considerations of clay based processes, mechanical, thermal and electric properties and surface properties as well as erosion resistance. Carbon nanotubes are discussed as a means of creation of non linear conductivity, the text concludes with a industrial applications perspective.