Handbook Of Microlithography Micromachining And Microfabrication Micromachining And Microfabrication
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Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.