Gettering And Defect Engineering In Semiconductor Technology Iv
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Gettering and Defect Engineering in Semiconductor Technology IV
Author: M. Kittler
language: en
Publisher: Trans Tech Publications Ltd
Release Date: 1991-01-01
Proceedings of the 4th International Conference on Gettering and Defect Engineering In Semiconductor Technology (GADEST '91), Frankfurt, Germany, October 1991
Gettering and Defect Engineering in Semiconductor Technology III
Author: M. Kittler
language: en
Publisher: Trans Tech Publications Ltd
Release Date: 1989-01-01
Proceedings of the 3rd International Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST '89) held at Garzau, GDR, October 1989
Gettering and Defect Engineering in Semiconductor Technology
The volume contains 78 contributions to the important field of semiconductor defect control and defect engineering.