Gate Stack And Silicide Issues In Silicon Processing
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High k Gate Dielectrics
The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be requ
Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Diele[c]trics VIII
Author: Ram Ekwal Sah
language: en
Publisher: The Electrochemical Society
Release Date: 2005