Fundamentals Of Semiconductor Manufacturing And Process Control
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Fundamentals of Semiconductor Manufacturing and Process Control
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
DeGarmo's Materials and Processes in Manufacturing, Global Edition
Newly revised, DeGarmo's Materials and Processes in Manufacturing has been the market-leading text on manufacturing and manufacturing processes courses for over fifty years. Authors J T. Black and Ron Kohser have continued this book's long and distinguished tradition of exceedingly clear presentation and highly practical approach to materials and processes, presenting mathematical models and analytical equations only when they enhance the basic understanding of the material. Updated to reflect all current practices, standards, and materials, this edition has new coverage of additive manufacturing, lean engineering, and processes related to ceramics, polymers, and plastics.
DeGarmo's Materials and Processes in Manufacturing
Author: Ernest Paul DeGarmo
language: en
Publisher: John Wiley & Sons
Release Date: 2011-08-30
Now in its eleventh edition, DeGarmo's Materials and Processes in Manufacturing has been a market-leading text on manufacturing and manufacturing processes courses for more than fifty years. Authors J T. Black and Ron Kohser have continued this book's long and distinguished tradition of exceedingly clear presentation and highly practical approach to materials and processes, presenting mathematical models and analytical equations only when they enhance the basic understanding of the material. Completely revised and updated to reflect all current practices, standards, and materials, the eleventh edition has new coverage of additive manufacturing, lean engineering, and processes related to ceramics, polymers, and plastics.