Fundamentals Of Microelectromechanical Systems Mems
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Fundamentals of Microelectromechanical Systems (MEMS)
Author: Eun Sok Kim
language: en
Publisher: McGraw Hill Professional
Release Date: 2021-05-14
A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development. Coverage includes: Basic microfabrication Micromachining Transduction principles RF and optical MEMS Mechanics and inertial sensors Thin film properties and SAW/BAW sensors Pressure sensors and microphones Piezoelectric films Material properties expressed as tensor Microfluidic systems and BioMEMS Power MEMS Electronic noises, interface circuits, and oscillators
BioMEMS
This book highlights the latest advances in bioMEMS for biosensing applications. It comprehensively reviews different detection methods, including colorimetric, fluorescence, luminescence, bioluminescence, chemiluminescence, biochemiluminescence, and electrochemiluminescence, and presents various bioMEMS for each, together with recent examples. The book also offers an overview of the history of BioMEMS and the design and manufacture of the first bioMEMS-based devices.
Fundamentals of BioMEMS and Medical Microdevices
The world is on the threshold of a revolution that will change medicine and how patients are treated forever. Bringing together the creative talents of electrical, mechanical, optical and chemical engineers, materials specialists, clinical-laboratory scientists, and physicians, the science of biomedical microelectromechanical systems (bioMEMS) promises to deliver sensitive, selective, fast, low cost, less invasive, and more robust methods for diagnostics, individualized treatment, and novel drug delivery. This book is an introduction to this multidisciplinary technology and the current state of micromedical devices in use today. The first text of its kind dedicated to bioMEMS training. Fundamentals of BioMEMS and Medical Microdevices is Suitable for a single semester course for senior and graduate-level students, or as an introduction to others interested or already working in the field.