Fundamentals Of Beam Solid Interactions And Transient Thermal Processing Volume 100
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Fundamentals of Beam-Solid Interactions and Transient Thermal Processing: Volume 100
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Rapid Thermal Processing
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Phase Formation and Modification by Beam-Solid Interactions: Volume 235
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.