Factory Controller
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Programmable Controllers for Factory Automation
This book is intended to address both the quantitative and qualitative issues of programmable controllers for factory automation. It is helpful for both the newcomer to the field and the experienced control engineer requiring a fresh perspective.
Run-to-Run Control in Semiconductor Manufacturing
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Discrete-Event Modeling and Simulation
Collecting the work of the foremost scientists in the field, Discrete-Event Modeling and Simulation: Theory and Applications presents the state of the art in modeling discrete-event systems using the discrete-event system specification (DEVS) approach. It introduces the latest advances, recent extensions of formal techniques, and real-world examples of various applications. The book covers many topics that pertain to several layers of the modeling and simulation architecture. It discusses DEVS model development support and the interaction of DEVS with other methodologies. It describes different forms of simulation supported by DEVS, the use of real-time DEVS simulation, the relationship between DEVS and graph transformation, the influence of DEVS variants on simulation performance, and interoperability and composability with emphasis on DEVS standardization. The text also examines extensions to DEVS, new formalisms, and abstractions of DEVS models as well as the theory and analysis behind real-world system identification and control. To support the generation and search of optimal models of a system, a framework is developed based on the system entity structure and its transformation to DEVS simulation models. In addition, the book explores numerous interesting examples that illustrate the use of DEVS to build successful applications, including optical network-on-chip, construction/building design, process control, workflow systems, and environmental models. A one-stop resource on advances in DEVS theory, applications, and methodology, this volume offers a sampling of the best research in the area, a broad picture of the DEVS landscape, and trend-setting applications enabled by the DEVS approach. It provides the basis for future research discoveries and encourages the development of new applications.