Doping Engineering For Front End Processing
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Doping Engineering for Front-End Processing: Volume 1070
Author: Materials Research Society. Meeting Symposium E.
language: en
Publisher:
Release Date: 2008-10-17
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Doping Engineering for Device Fabrication: Volume 912
This volume from the 2006 MRS Spring Meeting focuses on fundamental materials science and device research for current transistor technologies. Materials scientists come together with silicon technologists and TCAD researchers and activation technologies for integrated circuits, to discuss current achievements research directions.
Si Front-End Processing: Volume 669
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.