Design Modeling And Control Of Nanopositioning Systems

Design, Modeling and Control of Nanopositioning Systems

Design, Modeling and Control of Nanopositioning Systems

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control. Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging. Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

Advances in Mechanism, Machine Science and Engineering in China

This book presents the conference proceedings of the 23rd IFToMM China International Conference on Mechanism and Machine Science & Engineering (IFToMM CCMMS 2022). CCMMS was initiated in 1982, and it is the most important forum held in China for the exchange of research ideas, presentation of technical and scientific achievements, and discussion of future directions in the field of mechanism and machine science. The topics include parallel/hybrid mechanism synthesis and analysis, theoretical & computational kinematics, compliant mechanisms and micro/nano-mechanisms, reconfigurable and metamorphic mechanisms, space structures, mechanisms and materials, structure adaptation in space environment and ground testing, large-scale membrane deployable structures, construction and application of super-scale space systems, cams, gears and combining mechanisms, fluid power mechatronics drivetrain, mechanical design theory and methods, dynamics and vibration control, mechatronics, biologically inspired mechanisms and robotics, medical & rehabilitation robotics, mobile robotics, soft robotics, heavy non-road mobile machine, robot applications, engineering education on mechanisms, machines, and robotics. This book provides a state-of-the-art overview of current advances in mechanism and machine science in China. The inspiring ideas presented in the papers enlighten academic research and industrial application. The potential readers include academic researchers and industrial professionals in mechanism and machine science.