Design Fabrication And Dynamic Modeling Of A Printed Circuit Based Mems Accelerometer

Design, Fabrication, and Dynamic Modeling of a Printed Circuit Based MEMS Accelerometer

Proceedings of the 1st International Conference on Electronics, Biomedical Engineering, and Health Informatics

This Conference proceeding presents high-quality peer-reviewed papers from the International Conference on Electronics, Biomedical Engineering, and Health Informatics (ICEBEHI) 2020 held at Surabaya, Indonesia. The contents are broadly divided into three parts: (i) Electronics, (ii) Biomedical Engineering, and (iii) Health Informatics. The major focus is on emerging technologies and their applications in the domain of biomedical engineering. It includes papers based on original theoretical, practical, and experimental simulations, development, applications, measurements, and testing. Featuring the latest advances in the field of biomedical engineering applications, this book serves as a definitive reference resource for researchers, professors, and practitioners interested in exploring advanced techniques in the field of electronics, biomedical engineering, and health informatics. The applications and solutions discussed here provide excellent reference material for future product development.

MEMS Linear and Nonlinear Statics and Dynamics

MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.