Defect Engineering In Semiconductor Growth Processing And Device Technology
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Defect Engineering in Semiconductor Growth, Processing, and Device Technology
Proceedings of the San Francisco meeting of April-May 1992. Papers emphasize deliberate and controlled introduction and manipulation of defects in order to engineer some desired properties in semiconductor materials and devices. Topics include: defects in bulk crystals, and in thin films; defect characterization; hydrogen interaction; processing induction of defects; quantum wells; ion implantation. Annotation copyright by Book News, Inc., Portland, OR
Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Author: Dieter K. Schroder
language: en
Publisher: The Electrochemical Society
Release Date: 1994