Characterization In Compound Semiconductor Processing
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Characterization in Compound Semiconductor Processing
The book will have two major sections, one on Si based systems and the other on compound semiconductor systems. Although there are many materials common to both technologies, the applications, processing, and problems seen, are different enough to warrant this separation. In the silicon section there will be a chapter on semiconducting layers, such as epi SI, SOI layers, Si Ge films, etc., discussing the techniques used in problem-solving in these films. In the area of conducting films there will be chapters of doped poly Si, silicides and polycides, Al- and/or Cu-cased films, W-based films and one on barrier materials. Each of these systems is sufficiently different to benefit from a different author and a separate discussion of the types of problems encountered. This section will then be completed by a chapter or dielectric films. Even though there are a number of different applications for dielectrics, i.e. passivation films, intermetal dielectrics, gate oxides, field oxides, ad
Encyclopedia of Materials Characterization
Author: Charles A. Evans
language: en
Publisher: Gulf Professional Publishing
Release Date: 1992
"This is a comprehensive volume on analytical techniques used in materials science for the characterization of surfaces, interfaces and thin films. This flagship volume is a unique, stand-alone reference for materials science practitioners, process engineers, students and anyone with a need to know about the capabilities available in materials analysis. An encyclopedia of 50 concise articles, this book will also be a practical companion to the forthcoming books in the series."--Knovel.
Compound Semiconductor Bulk Materials and Characterizations
This book is concerned with compound semiconductor bulk materials and has been written for students, researchers and engineers in material science and device fabrication. It offers them the elementary and intermediate knowledge of compound semiconductor bulk materials necessary for entering this field. In the first part, the book describes the physical properties, crystal growth technologies, principles of crystal growth, various defects in crystals, characterization techniques and applications. In the second and the third parts, the book reviews various compound semiconductor materials, including important industrial materials and the results of recent research.