Anofabrication
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Nanofabrication
Author: Zheng Cui
language: en
Publisher: Springer Science & Business Media
Release Date: 2009-01-01
Nanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed. Drawing upon years of practical experience and using numerous examples, Zheng Cui covers state-of-the art technologies in nanofabrication including: Photon-based lithography Charged particle beams lithography Nanofabrication using scanning probes Nanoscale replication Nanoscale pattern transfer Indirect nanofabrication Nanofabrication by self-assembly Nanofabrication: Principles, Capabilities and Limits will serve as a practical guide and first-hand reference for researchers and practitioners working in nanostructure fabrication and also provides a "tool box" of various techniques that can be easily adapted in different fields of applications. Written for: Nanoscience and nanotechnology researchers and engineers, technical professionals and academic researchers in the fields of electrtonics, mechanical engineering, and chemical engineering.
Nanofabrication Techniques
Nanofabrication is the process of assembling structures at the nanoscale with unique properties. This book describes proficient, low-cost, and robust nanofabrication techniques to produce nanostructures. It presents information on nanofabrication technology principles, methodologies, equipment, and processes, as well as discusses the fabrication of new structures for new applications. The nanofabrication techniques reviewed are applicable to different engineering processes, nano-electromechanical systems, biosensors, nanomaterials, photonic crystals, devices, and new structures. This book is a useful resource for students and professionals, including engineers, scientists, researchers, technicians, and technology managers.
Micro and Nanomanufacturing
Author: Mark J. Jackson
language: en
Publisher: Springer Science & Business Media
Release Date: 2007-06-19
Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about: Manufacturing and fabrication techniques at the micro and nanoscales; Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors; Producing master molds with micromachining; The deposition of thin films, pulsed water drop machining, and nanomachining. Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining.