Advanced Mems Nems Fabrication And Sensors
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Advanced MEMS/NEMS Fabrication and Sensors
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Piezoelectric Sensors
This book provides a comprehensive overview of piezoelectric sensor devices and instrumentation and their use for chemical and biochemical analysis. Sensors relying on established transducers, such as the quartz crystal microbalance (QCM) and the surface acoustic wave resonator (SAW) are covered, and novel devices like surface transverse wave (STW) resonators, film bulk acoustic resonators (FBAR) as well as non-piezoelectric devices with mass-sensitive properties are presented. As their name implies, such devices respond directly to mass changes on their surfaces and thus address the most fundamental quality of any analytes. First, the book presents the fundamentals of new measuring strategies with these devices. Then, it introduces a variety of chemo- and biosensing application scenarios of these devices. In addition, the book covers both the state-of-the-art of academic research and prospects concerning the commercialization of these sensors. Given its scope, the book is of interest to academics, specialists in industry, and advanced students in the areas of analytical chemistry, rapid analysis, and sensor technology, giving them the unique possibility to familiarize themselves with this chemical sensing strategy. Readers will benefit from the coverage of both cutting-edge research results and applications that help bridge the gap between academia and industry.
Proceedings of the 9th International Conference on Mechanical Manufacturing Technology and Material Engineering
This book offers a comprehensive examination of the latest advancements in mechanical manufacturing technology and material engineering, as presented at the 9th International Conference on Mechanical Manufacturing Technology and Material Engineering (MMTME 2024). It delves into the forefront of research in areas like additive manufacturing, smart manufacturing systems, and innovative material solutions, addressing the current gaps and technological challenges within the industry. The book is structured to highlight significant innovations that are poised to redefine manufacturing processes, enhance material performance, and drive sustainability in production. Each chapter provides in-depth analysis of emerging technologies and their practical applications, backed by recent case studies and expert insights. Key topics such as the integration of AI and IoT in manufacturing, advancements in 3D and 4D printing technologies, and the development of new sustainable materials are explored. These are critical for pushing the boundaries of what is possible in manufacturing and materials science today. This book is significant as it not only encapsulates state-of-the-art research but also provides a vision for future directions in the field. It sets out to solve problems related to efficiency, cost-effectiveness, and environmental impact in manufacturing, offering new perspectives and solutions to researchers and professionals. The target audience includes academic researchers, industry professionals, and engineers in the fields of mechanical manufacturing and material engineering.