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Resonant MEMS: Fundamentals, Implementation, and Application (Advanced Micro and Nanosystems)

Resonant MEMS: Fundamentals, Implementation, and Application (Advanced Micro and Nanosystems)

ISBN: 3527335455

ISBN 13: 9783527335459

Authors: Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Jan G. Korvink, Osamu Tabata

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