Reliability of Mems: Testing of Materials and Devices

ISBN: 3527675035
ISBN 13: 9783527675036
Authors: Osamu Tabata, Toshiyuki Tsuchiya, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink
ISBN: 3527675035
ISBN 13: 9783527675036
Authors: Osamu Tabata, Toshiyuki Tsuchiya, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink