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Fundamentals of Semiconductor Manufacturing and Process Control
by Gary S. May, Costas J. Spanos
Technology & Engineering / Electrical
Technology & Engineering / Electronics / General
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John Wiley & Sons
Year: 2006
Pages: 488
Language: EN
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About this book
A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that ...
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