Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems

Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems

ISBN: 0982299109

ISBN 13: 9780982299104

Author: Ville Kaajakari

4.25 of 12

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