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Resonant MEMS: Fundamentals, Implementation, and Application (Advanced Micro and Nanosystems) by Oliver Brand (Editor), Isabelle Dufour (Editor), Stephen Heinrich (Editor), (22-Apr-2015) Hardcover
Resonant MEMS: Fundamentals, Implementation, and Application (Advanced Micro and Nanosystems) by Oliver Brand (Editor), Isabelle Dufour (Editor), Stephen Heinrich (Editor), (22-Apr-2015) Hardcover
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