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System-level Modeling of MEMS, Volume 10 (Advanced Micro and Nanosystems)

System-level Modeling of MEMS, Volume 10 (Advanced Micro and Nanosystems)

ISBN: 3527647120

ISBN 13: 9783527647125

Authors: Tamara Bechtold, Gabriele Schrag, Lihong Feng, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

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